| Horizontal Performance | |
| Traverse length - X Min / Max | 0.1mm to 50mm (0.004in to 1.97in) |
| Traverse / measuring speeds | 10mm/s (0.39in/s) max - 1mm/s (0.039in/s) |
| Data sampling interval in X | 0.5μm (20μin ) |
| Straightness error (Pt) | 0.4μm over 50mm (16μin over 1.96in) |
| 0.2μm over any 20mm (8μin over any 0.78in) | |
| Vertical Performance | |
| Nominal measuring range (Z) | 1mm (0.04in ) |
| Resolution (Z) | 16nm @ 1mm range (0.63μin @ 0.04in) |
| 3nm @ 0.2mm range (0.12μin @ 0.008in) | |
| Range to resolution ratio | 65,536 : 1 |
| Stylus arm length, tip size, force | 60mm arm, 2μm radius conisphere diamond stylus, 1mN force |
| System Performance | |
| Spherical calibration artifact | 12.5mm (0.49in) nominal radius |
| Calibration uncertainty - Pt | < 0.25μm (10μin) |
| Radius measurement uncertainty | 0.1 - 12.5mm (0.004 - 0.5in) = 2% to 0.04% of nominal |
| 12.5 - 25mm (0.5 - 1in) = 0.04% of nominal | |
| 25 - 1000mm (1 - 39.4in) = 0.04% to 0.2% of nominal | |
| Angle measurement uncertainty | within 1% of measured angle (+ / - 35º maximum range) |
| Parameter height uncertainty | within 2% + 6nm (0.24μin) (peak parameters only) |
| Dimensions L x D x H | Traverse unit - 343 x 116 x 160mm (13.5 x 4.6 x 6.3in) Control module - 285 x 200 x 80mm (11.2 x .9 x 3.2in) |
| Weight | Traverse unit - 4.9Kg (10.8lbs) Control module - 1.9Kg (4.2lbs) |
| Environment notes |
| Storage temperature |
| 5ºC to 40ºC (41ºF to 104ºF) |
| Storage humidity |
| 10% to 80% Relative, non condensing |
| Operating temperature |
| 15ºC to 30ºC (59ºF to 86ºF) |
| Temperature gradient |
| < 2ºC (< 3.6ºF) per hour |
| Operating humidity |
| 45% to 75% Relative, non condensing |
| Maximum RMS floor vibration |
| 2.5μm/s (100μin/s) at < 50Hz |
| 5.0μm/s (200μin/s) at > 50Hz |
| Electrical supply |
| 110 / 220 / 240V - 50 / 60 Hz |
| Power consumption |
| 10VA traverse unit / 18VA processor |
| Safety |
| EN 61010 - 1 : 2001 EMC EN 61000 - 6 - 4 : 2001 EN 61000 - 6 - 1 : 2001 |
| Note: Taylor Hobson pursues a policy of continual improvement due to technical developments. We therefore reserve the right to deviate from catalog specifications. |
